
The 3D profilometry inspection system is for 3D object profile measurement , which integrated with DMD chip through phase-shifting techniques. And phase-shifting profilometry technique is based on the projection of digital interference patterns and computation of the absolute phase map. It offers a fast, robust, and full field measurement for field sizes from approximately 1mm^2 to several cm^2.
This Non-scanning, non-contact technologies are able to measure the surface topography within a single camera acquisition, XYZ scanning is no longer needed. As a consequence, dynamic changes of topography are measured in real-time, hence it could be used for many application fields which require 3D data.
In this project, the role of our company was optical system design, including projection system and illumination system, optical components selection and fabrication, algorithm testing and optical system characteristic measurement.